Integrated Surface Technologies delivers Repellix coatings through its family of supermolecular vapor deposition (SVD) systems:
The RGM-210 can deliver to 2 separate vapor sources plus 1 additional gaseous source (e.g. ozone, Ar, N2) to a variety of substrates. It has the capacity to coat a full 8" wafer cassette, 60 µ-tiger-plates, or many smaller shapes and sizes.
The gases are formed and delivered in the Vaporrix system, which is a propriety technology invented by IST. The Vaporrix system is fully enclosed, purged, and easy to refill.
The system is extremely compact and is intended to fit on a bench top workstation with a remote facility box to supply additional facilities.
- Frontal Width:
- 17.3” / 43.9 cm
- Depth:
- 20.6” / 52.3 cm
- Height:
- 17.3” / 43.9 cm
The RGM-210 is designed to apply surface modification chemistries as well as Repellix.